AMAT Thinfilm Refurbishment
- • Endura 5500_PVD
- • Endura 5500_MO-CVD
- • Centura 5200_DxZ
- • Centura 5200_HDP
- • Centura 5200_PVD
- • Centura 5200_DLH
- • Centura 5200_CxZ
- • Producer
- • P-5000_CVD
- • 300MM ULTIMA-X
- • 300MM Producer-SE
- • 300MM Producer-GT
Used Equipment Refurbishment & Maintenance
We provide professional service and preventive maintenance to keep semiconductor manufacturing equipment at optimal performance. Used equipment refurbishment Upgrade and modification support Relocation SET-UP Process conversion/Wafer conversion (8<->6) BM & PM support
Parts Repair & Overhaul
- • Ceramic Heater Overhaul
- • P, C-Chuck Overhaul
- • HDP Ceramic ESC Overhaul
- • MCA ESC Overhaul
- • EPD Repair & Overhaul
- • Throttle Valve Overhaul
Field Service
- • AMAT 200mm/300mm T/F System
- • AMAT Tool Dismantle Service
- • System Relocation Service
- • System Setup Service
- • System Modify & Upgrade Service
- • BM Trouble Shooting & PM 대응
Parts Sales
- • Dual SSD HDD
- • Consumable Parts
- • Tool PM Kit
- • 검증완료의2ND신품
- • OPM Parts
P5000
SACVD / PECVD / DxZ / WCVD
CENTURA
DLH / DxZ / CxZ / WxZ CVD
ULTIMA HDP
STD / PLUS / TE / X HDP CVD
PRODUCER
PECVD / SACVD / APF
ENDURA
AL / TI / TIN / CU / MOCVD
MxP SERIES
inMxP / MxP+ / eMxP+
DPS
DPS R1 / DPS+
SUPER-E
SUPER-E / eMAX
RTP
XE / XE+ / RADIANCE / ATM / RP
EPI
AP / RP & GT
PRODUCER-GT
USG / APF / SIN / TEOS / HARP / BD
ULTIMA-X
USG / IPM / FSG / PSG
ENDURA-CL
CL
PRODUCER-SE
Process Conversion